Friday, October 28, 2016
Publication Date: 02/1/2009
Archive >  February 2009 Issue >  Electronic Mfg. Products > 

Inficon Releases Upgraded FabGuard
Advanced process control and fault detection.
Syracuse, NY — Inficon has released FabGuard 8.0 Advanced Process Control, Fault Detection and Classification (FDC) System, the latest in the FabGuard suite of products supporting sensor and tool integration for standalone applications and enterprise-wide installations. The new product reportedly delivers excellent power and ease-of-use for full-featured data acquisition and analysis with extensive enterprise management capabilities to better support unique customer infrastructures.

New features in Version 8.0 include added communication and infrastructure support, interface modifications, and additional equipment and process control techniques. It supports partitioned Oracle databases greater than 25TB. Communication protocols, such as OPC, and new sensor drivers have been added to the new version to increase the number of potential data sources available to engineers.

In addition, new user interface modifications increase compatibility with third-party computers, widening the hardware specifications and potentially decreasing the cost required providing more flexibility in features, function, and value.

The new version also allows process engineers to perform both advanced equipment control and advanced process control to increase their ability to detect excursions in the factory. The software provides expanded advanced equipment control techniques by creating and collecting equipment performance indicators (EPI) to monitor non-process specific information. EPIs include wafer transfer durations, calibration offsets and robot states, and inter-tool and full-factory substrate tracking.

Contact: Inficon, Two Technology Place, East Syracuse, NY 13057-9714 315-434-1100 fax: 315-437-3803 E-mail: Web:

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