Tuesday, September 26, 2017
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Panasonic & imec: Highest-Q MEMS Resonator

San Francisco, CA — Panasonic and imec have jointly presented an innovative SiGe (silicon germanium) thin film packaged SOI-based MEMS resonator that has an industry-record Q factor combined with a low bias voltage. The high Q factor was achieved by implementing a resonator that operates in a torsional ...
 
 
 
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